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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/15976
Record Status
Checked
Record Id
15976
Title
Novel route for the production of X-ray masks from a range of organometallic films
Contributors
MR Davidson
,
GJ Berry
,
JA Cairns
,
AG Fitzgerald
,
B Lawrenson
,
J Thomson
,
ICE Turcu
,
W Shaikh
,
N Spencer
,
RM Allott
,
N Takeyasu
Abstract
Organisation
CCLRC
,
CLF
,
CLF-LFS
Keywords
CLF 1997-1998
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Microelectron Eng
41/42 (1998): 279.
doi:10.1016/S0167-9317(98)00064-1
1998
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