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Persistent URL http://purl.org/net/epubs/work/15976
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Record Id 15976
Title Novel route for the production of X-ray masks from a range of organometallic films
Organisation CCLRC , CLF , CLF-LFS
Keywords CLF 1997-1998
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Language English (EN)
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Journal Article Microelectron Eng 41/42 (1998): 279. doi:10.1016/S0167-9317(98)00064-1 1998