ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/15976
Record Status Checked
Record Id 15976
Title Novel route for the production of X-ray masks from a range of organometallic films
Contributors
Abstract
Organisation CCLRC , CLF , LFS
Keywords CLF 1997-1998
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 41/42 (1998): 279. doi:10.1016/S0167-9317(98)00064-1 1998
Showing record 1 of 1
RCUK
Science and Technology Facilities Council Switchboard: 01793 442000