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Persistent URL http://purl.org/net/epubs/work/16889
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Record Id 16889
Title Characterisation of plasma-assisted CVD grown polycrystalline Si on glass substrates
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Abstract
Organisation CCLRC , CLF , LFS
Keywords CLF 1999-2000
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Language English (EN)
Type Details URI(s) Local file(s) Year
Presentation Presented at MRS fall meeting - optical microstructural characterization of semiconductors, Boston, USA (November 1999).
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Science and Technology Facilities Council Switchboard: 01793 442000