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Persistent URL http://purl.org/net/epubs/work/18521
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Record Id 18521
Title X-ray micro- and nanofabrication using a laser-plasma source at 1 nm wavelength
Contributors
Abstract
Organisation CCLRC , CLF , SSTD
Keywords Be , EXCIMER , FIELD , MICROWAVE , NM , PLASMA , SYSTEM , X ray , structure , x ray lithography
Funding Information
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol B 15, no. 6 (1997): 2495-2502. doi:10.1116/1.589673 1997
Presentation Presented at 41st International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Dana Point, USA (May 1997).