ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/22882
Record Status Checked
Record Id 22882
Title X-RAY LITHOGRAPHY USING SYNCHROTRON RADIATION
Contributors
Abstract
Organisation SERC
Keywords
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Report DL/SCI/P405E. 1983. 1983
Report C83/09/28. 1983. 1983