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Persistent URL http://purl.org/net/epubs/work/30253
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Record Id 30253
Title Dopant Behaviour and Damage Annealing in Silicon Implanted with 1keV Asenic
Organisation CCLRC , SND , MEIS
Keywords Physics
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Nucl Instrum Meth B 186, no. 1-4 (2001): 271-275. doi:10.1016/S0168-583X(01)00877-1 2001