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Persistent URL http://purl.org/net/epubs/work/30300
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Record Id 30300
Title An Investigation on the Ultra Low Energy As Ion Implantation Process and the Dopant Behaviour During Theraml Annealing
Organisation CCLRC , SND , MEIS
Keywords Physics
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Language English (EN)
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Thesis PhD, University of Salford, 2001. 2001