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Persistent URL http://purl.org/net/epubs/work/31341817
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Record Id 31341817
Title RF surface resistance study of non-evaporable getter coatings
Contributors
Abstract
Organisation ASTeC , CI , STFC
Keywords
Funding Information STFC; ASML
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Nucl Instrum Meth A 844 (2017): 99-107. doi:10.1016/j.nima.2016.11.039 2017