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Persistent URL http://purl.org/net/epubs/work/31545305
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Record Id 31545305
Title Dual wavelength optical metrology using ptychography
Contributors
Abstract
Organisation CLF , CLF-LFS , STFC
Keywords LLP
Funding Information
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Journal of Optics 15, no. 3 (2013): 035702. doi:10.1088/2040-8978/15/3/035702 2013
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