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Persistent URL http://purl.org/net/epubs/work/32591597
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Record Id 32591597
Title Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser
Contributors
Abstract High speed patterning of a 30 nm thick Aluminium thin film on a flexible Polyethylene Terephthalate substrate was demonstrated with the aid of Computer Generated Holograms (CGH's) applied to a phase only Spatial Light Modulator. Low fluence picosecond laser pulses minimise thermal damage to the sensitive substrate and thus clean, single and multi-beam, front side thin film removal is achieved with good edge quality. Interestingly, rear side ablation shows significant Al film delamination. Measured front and rear side ablation thresholds were Fth=0.20±0.01 J cm-2 and Fth=0.15±0.01 J cm-2 respectively. With laser repetition rate of 200 kHz and 8 diffractive spots, a film removal rate of R>0.5 cm2 s-1 was demonstrated during patterning with a fixed CGH and 5 W average laser power. The effective laser repetition rate was feff~1.3 MHz. The application of 30 stored CGH's switching up to 10 Hz was also synchronised with motion control, allowing dynamic large area multi-beam patterning which however, slows micro-fabrication.
Organisation CI
Keywords
Funding Information North West Science Fund (N0003200); TSB, PARALASE (TP11/LLd/6/1/AF063B); ERDF Capital, KE-LAS (X01436PR)
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Opt Lasers Eng 74 (2015): 67-74. doi:10.1016/j.optlaseng.2015.04.006 2015
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