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Persistent URL http://purl.org/net/epubs/work/32891
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Record Id 32891
Title SIMS Depth profiling of Ultra-Low Energy Ion Implanted Silicon Using Sub-keV Ion Beams
Contributors
Abstract
Organisation CCLRC , SND , MEIS
Keywords Physics
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Thesis 2003. 2003
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RCUK
Science and Technology Facilities Council Switchboard: 01793 442000