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Persistent URL http://purl.org/net/epubs/work/32891
Record Status Checked
Record Id 32891
Title SIMS Depth profiling of Ultra-Low Energy Ion Implanted Silicon Using Sub-keV Ion Beams
Organisation CCLRC , SND , MEIS
Keywords Physics
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Language English (EN)
Type Details URI(s) Local file(s) Year
Thesis 2003. 2003