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Persistent URL http://purl.org/net/epubs/work/38644027
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Record Id 38644027
Title Superconducting Coatings Synthetized by CVD/PECVD for SRF Cavities
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Abstract Finding a way to overcome the acceleration gradient limits that bulk niobium cavities can provide is a major challenge, fundamental to allow the accelerator science field to progress. In order to overcome the accelerating gradient limits of bulk niobium and reduce manufacturing and operation costs, the idea of using thin layers of niobium deposited on a copper cavity is being explored. This approach has lower material cost with higher availability and more importantly higher thermal conductivity. Physical vapour deposition (PVD) method is currently the preferred method to coat superconducting cavities, but its lack of conformity renders complicated shapes such as crab cavities very difficult to coat. By using chemical vapour deposition (CVD) and plasma enhanced chemical vapour deposition (PECVD) it is possible to deposit thin Nb layers uniformly with density very close to bulk material. This project explores the use of PECVD / CVD techniques to deposit metallic niobium on copper using NbCl5 as precursor and hydrogen as a coreagent. The samples obtained were then characterized via SEM, XRD, and EDX as well as assessing their superconductivity characteristics (RRR and Tc). The samples deposited are superconductive and polycrystalline; the sample obtained with PECVD exhibited RRR=9 and Tc= 9.4 K. The film grew in a (100) preferred orientation. A successful preliminary deposition of NbN has also been performed and analyzed via EDX.
Organisation ISIS , TECH , STFC
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Language English (EN)
Type Details URI(s) Local file(s) Year
Paper In Conference Proceedings In 17th International Conference on RF Superconductivity (SRF2015), Whistler, BC, Canada, 13-18 Sep 2015, (2015): 643-646. http://accelconf.…5/papers/tupb038.pdf 2015
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