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Persistent URL http://purl.org/net/epubs/work/38644089
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Record Id 38644089
Title High Power Impulse Magnetron Sputtering of Thin Films for Superconducting RF Cavities
Abstract The production of superconducting coatings for radio frequency cavities is a rapidly developing field that should ultimately lead to acceleration gradients greater than those obtained by bulk Nb RF cavities. The use of thin films made from superconductors with thermodynamic critical field, allows the possibility of multi-layer superconductor insulator – superconductor (SIS) films and also accelerators that could operate at temperatures above the 2 K typically used. SIS films theoretically allow increased acceleration gradient due to magnetic shielding of underlying superconducting layers [1] and higher operating temperature can reduce cost [2]. High impulse magnetron sputtering (HiPIMS) and pulsed DC magnetron sputtering processes were used to deposit NbN and NbTiN thin films onto Si(100) substrate. The films were characterised using scanning electron microscopy (SEM), x-ray diffraction (XRD), Rutherford back-scattering spectroscopy (RBS) and a four point probe.
Organisation ISIS , ASTeC , STFC
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Language English (EN)
Type Details URI(s) Local file(s) Year
Paper In Conference Proceedings In 17th International Conference on RF Superconductivity (SRF2015), Whistler, BC, Canada , 13-18 Sep 2015, (2015): 647-650. http://accelconf.…5/papers/tupb040.pdf 2015
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