ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/45428649
Record Status Checked
Record Id 45428649
Title Simulation of sputtering from an isolated conductor surrounded by a dielectric during plasma etching
Contributors
Abstract
Organisation CI
Keywords
Funding Information RFBR (14-08-00143); NRNU MEPhI
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Vacuum 165 (2019): 262-265. doi:10.1016/j.vacuum.2019.04.021 2019