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Full Record Details

Persistent URL	http://purl.org/net/epubs/work/50766
Record Status	Checked
Record Id	50766
Title	Estimate of dielectric density using spectroscopic ellipsometry
Contributors	W Davey (Liverpool U.), O Buiu (Liverpool U.), M Werner (Liverpool U.), IZ Mitrovic (Liverpool U.), S Hall (Liverpool U.), PR Chalker (Liverpool U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Microelectron Eng 86 (2009): 1905-1907.	doi:10.1016/j.mee.2009.03.027		2009