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Persistent URL http://purl.org/net/epubs/work/50766
Record Status Checked
Record Id 50766
Title Estimate of dielectric density using spectroscopic ellipsometry
Organisation MEIS , STFC
Keywords Materials
Funding Information
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 86 (2009): 1905-1907. doi:10.1016/j.mee.2009.03.027 2009
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