ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/50766
Record Status Checked
Record Id 50766
Title Estimate of dielectric density using spectroscopic ellipsometry
Contributors
Abstract
Organisation MEIS , STFC
Keywords Materials
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 86 (2009): 1905-1907. doi:10.1016/j.mee.2009.03.027 2009
Showing record 1 of 1