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Persistent URL http://purl.org/net/epubs/work/51956
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Record Id 51956
Title Silicon nanowire sensor for gas detection fabricated by nanoimprint on SU8/SiO2/PMMA trilayer
Organisation STFC
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Language English (EN)
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Journal Article Microelectron Eng 86, no. 4-6 (2009): 1238-1242. Is in proceedings of: 34th International Conference on Micro- and Nano-Engineering, Athens, Greece, 15-18 Sep 2008. doi:10.1016/j.mee.2008.12.022 2009
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