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Persistent URL http://purl.org/net/epubs/work/51958
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Record Id 51958
Title Fabrication of micro/nano fluidic channels by nanoimprint lithography and bonding using SU-8
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Language English (EN)
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Journal Article Microelectron Eng 86, no. 4-6 (2009): 1379-1381. Is in proceedings of: 34th International Conference on Micro- and Nano-Engineering, Athens, Greece, 15-18 Sep 2008. doi:10.1016/j.mee.2009.02.002 2009
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