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Persistent URL http://purl.org/net/epubs/work/52365325
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Record Id 52365325
Title Measurement of negative ion fluxes during DC reactive magnetron sputtering of Ti in Ar/O2 atmosphere using a magnetic-filtering probe
Contributors
Abstract
Organisation CI , STFC
Keywords
Funding Information TRF; Thailand Science Research and Innovation; OHEC (MRG6280182)
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Vacuum 194 (2021): 110549. doi:10.1016/j.vacuum.2021.110549 2021