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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/53599
Record Status
Checked
Record Id
53599
Title
Comparison of electrical measurements with structural analysis of thin High-k Hafnium-based films
Contributors
E Hourdakis (Salford U.)
,
M Theodoropoulou (Salford U.)
,
AG Nassiopoulou (Salford U.)
,
A Parisini (Salford U.)
,
MA Reading (Salford U.)
,
J Van den Berg (Salford U.)
,
T Conard (Salford U.)
,
S Degendt (Salford U.)
Abstract
Organisation
MEIS
,
STFC
Keywords
Materials
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
ECS Transactions 25, no. 3 (2009): 363-372.
doi:10.1149/1.3204426
2009
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