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Persistent URL http://purl.org/net/epubs/work/53599
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Record Id 53599
Title Comparison of electrical measurements with structural analysis of thin High-k Hafnium-based films
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article ECS Transactions 25, no. 3 (2009): 363-372. doi:10.1149/1.3204426 2009