ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL	http://purl.org/net/epubs/work/53600
Record Status	Checked
Record Id	53600
Title	Physical characterization of the Metal/High-k layer interaction upon annealing
Contributors	T Conard (Salford U.), A Franquet (Salford U.), W Vandervorst (Salford U.), M Reading (Salford U.), J Van den Berg (Salford U.), S Van Elschocht (Salford U.), T Schram (Salford U.), C Adelmann (Salford U.), S De Gendt (Salford U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	ECS Transactions 16, no. 5 (2008): 433-442.	doi:10.1149/1.2981624		2008