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Persistent URL http://purl.org/net/epubs/work/53600
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Record Id 53600
Title Physical characterization of the Metal/High-k layer interaction upon annealing
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article ECS Transactions 16, no. 5 (2008): 433-442. doi:10.1149/1.2981624 2008