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Persistent URL http://purl.org/net/epubs/work/53708
Record Status Checked
Record Id 53708
Title Electron stimulated desorption from bare and nonevaporable getter coated
Contributors
Abstract An installation for investigation of the electron stimulated desorption (ESD) from both pumping and non-pumping tubular samples was designed and built. This installation allows studying ESD and sample sticking probability as a function of electron dose up to about 1023 e-/m2, electron energy in the range of 10 eV to 6.5 keV and sampling temperature in the range of 0-80 °C. Two samples were investigated: bare and Ti-Zr-V coated stainless steel. The ESD yields were measured as a function of electron accumulated dose, electron energy and different NEG coating activation temperature. The effect of electron stimulated pumping of CO saturated NEG coating was demonstrated for a first time, and is in a good agreement with the effect of photon stimulated NEG activation measured earlier.
Organisation ASTeC , ASTeC-VS , STFC
Keywords Physics , activation , pumping , Electron stimulated desorption , non-evaporable getter , coating
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol A 28, no. 5 (2010): 1215-1225. doi:10.1116/1.3478672 2010
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