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Persistent URL http://purl.org/net/epubs/work/53708
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Record Id 53708
Title Electron stimulated desorption from bare and nonevaporable getter coated
Abstract An installation for investigation of the electron stimulated desorption (ESD) from both pumping and non-pumping tubular samples was designed and built. This installation allows studying ESD and sample sticking probability as a function of electron dose up to about 1023 e-/m2, electron energy in the range of 10 eV to 6.5 keV and sampling temperature in the range of 0-80 °C. Two samples were investigated: bare and Ti-Zr-V coated stainless steel. The ESD yields were measured as a function of electron accumulated dose, electron energy and different NEG coating activation temperature. The effect of electron stimulated pumping of CO saturated NEG coating was demonstrated for a first time, and is in a good agreement with the effect of photon stimulated NEG activation measured earlier.
Organisation ASTeC , ASTeC-VS , STFC
Keywords Physics , activation , pumping , Electron stimulated desorption , non-evaporable getter , coating
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol A 28, no. 5 (2010): 1215-1225. doi:10.1116/1.3478672 2010