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Persistent URL http://purl.org/net/epubs/work/54041
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Record Id 54041
Title Comparison of Ti-Zr-V nonevaporable getter films deposited using alloy or twisted wire sputter-targets
Abstract A comparison of the performance of non-evaporable getter (NEG) films deposited using two different types of targets has been made to find the one which has the best pumping properties. For the first time the NEG coating was deposited using a pre-formed Ti-Zr-V alloy target. The NEG film characterisation and pumping properties have been studied in comparison with a film deposited using the commonly-used three-wire twisted target. It was demonstrated that the alloy target produces a NEG coating with uniform composition both laterally and in depth. The composition of the film was found to be the same as the target. Film topography and microstructure with 5 nm grain size was found to be the same for both targets. The main result is that the activation temperature of the NEG coating deposited using the Ti-Zr-V alloy target is 160 ºC, which is 20 ºC lower than for NEG coatings deposited using three twisted wires.
Organisation ASTeC , ASTeC-VS , CI , STFC
Keywords Physics , activation , pumping , coating , Non-evaporable getter , sputtering , alloy target , film structure , morphology
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol A 28, no. 6 (2010): 1404-1412. doi:10.1116/1.3504600 2010