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Persistent URL	http://purl.org/net/epubs/work/55816
Record Status	Checked
Record Id	55816
Title	Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si
Contributors	I Mohacsi (Salford U.), P Petrik (Salford U.), M Fried (Salford U.), T Lohner (Salford U.), JA van den Berg (Salford U.), MA Reading (Salford U.), D Giubertoni (Salford U.), M Barozzi (Salford U.), A Parisini (Salford U.)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
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Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Thin Solid Films 519, no. 9 (2011): 2847-2851.	doi:10.1016/j.tsf.2010.12.076		2011