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Persistent URL http://purl.org/net/epubs/work/55816
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Record Id 55816
Title Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article Thin Solid Films 519, no. 9 (2011): 2847-2851. doi:10.1016/j.tsf.2010.12.076 2011