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Persistent URL http://purl.org/net/epubs/work/60785
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Record Id 60785
Title Pattern transfer of nano-scale ferroelectric PZT gratings by a reversal nanoimprint lithography
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Organisation TECH , STFC
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 88, no. 8 (2011): 2037-2040. doi:10.1016/j.mee.2011.01.055 2011
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