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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/62594451
Record Status
Checked
Record Id
62594451
Title
Titanium nitride thin films grown by ion beam physical vapor deposition
Contributors
E Isik
,
D Sterland (STFC Daresbury Lab.)
,
N Kilinc
,
GR Bell
Abstract
Organisation
ASTeC
,
STFC
Keywords
Funding Information
the Scientific and Technological Research Council of Türkiye
(1059B192001338)
Related Research Object(s):
Licence Information:
Creative Commons Attribution 4.0 International (CC BY 4.0)
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
APL Mater
13, no. 8 (2025): 081119.
doi:10.1063/5.0268865
2025
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