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Persistent URL http://purl.org/net/epubs/work/15974
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Record Id 15974
Title Deep 3D structures produced by soft X-ray lithography
Contributors
Abstract
Organisation CCLRC , CLF , LFS
Keywords CLF 1997-1998
Funding Information
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Semiconductor International 20, no. 6 (1997): 217-218. 1997
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RCUK
Science and Technology Facilities Council Switchboard: 01793 442000