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Persistent URL http://purl.org/net/epubs/work/16008
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Record Id 16008
Title 1 nm X-ray lithography using novel mask fabrication technique
Contributors
Abstract
Organisation CCLRC , CLF , LFS
Keywords CLF 1997-1998
Funding Information
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Rev Sci Instrum 69 (1998): 3350. doi:10.1063/1.1149099 1998
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Science and Technology Facilities Council Switchboard: 01793 442000