ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/16094
Record Status Checked
Record Id 16094
Title Use of a random phase plate as a KrF laser beam homogenizer for thin film deposition applications
Contributors
Abstract
Organisation CCLRC , CLF , LSD
Keywords CLF 1998-1999
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Rev Sci Instrum 70 (1999): 2116. doi:10.1063/1.1149723 1999
Showing record 1 of 1
RCUK
Science and Technology Facilities Council Switchboard: 01793 442000