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Persistent URL http://purl.org/net/epubs/work/31352
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Record Id 31352
Title A multi-technique study of titanium nitride films deposited via reactive sputter deposition
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Organisation CCLRC , SRS , 2.3 , 8.1
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Mater Sci Forum 325 (2000): 131-140. doi:10.4028/www.s….net/MSF.325-326.131 2000
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