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Persistent URL http://purl.org/net/epubs/work/32637382
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Record Id 32637382
Title UV-LIGA microfabrication process for sub-terahertz waveguides utilizing multiple layered SU-8 photoresist
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Abstract
Organisation CI
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Funding Information EPSRC (EPSRC EP/L026597/1)
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Journal of Micromechanics and Microengineering 26, no. 9 (2016): 095010. doi:10.1088/0960-1317/26/9/095010 2016
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