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Persistent URL http://purl.org/net/epubs/work/37981333
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Record Id 37981333
Title Particle-balance models for pulsed sputtering magnetrons
Contributors
Abstract
Organisation CI
Keywords
Funding Information VINNOVA (2014-04876); Icelandic Research Fund (130029)
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Phys D Appl Phys 50, no. 35 (2017): 354003. doi:10.1088/1361-6463/aa7d35 2017
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