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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/37981333
Record Status
Checked
Record Id
37981333
Title
Particle-balance models for pulsed sputtering magnetrons
Contributors
C Huo
,
D Lundin
,
JT Gudmundsson
,
MA Raadu
,
JW Bradley (University of Liverpool)
,
N Brenning
Abstract
Organisation
CI
Keywords
Funding Information
VINNOVA
(2014-04876);
Icelandic Research Fund
(130029)
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Phys D Appl Phys
50, no. 35 (2017): 354003.
doi:10.1088/1361-6463/aa7d35
2017
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