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Persistent URL http://purl.org/net/epubs/work/41201795
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Record Id 41201795
Title Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon
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Journal Article Nucl Instrum Meth B 273 (2012): 192-194. doi:10.1016/j.nimb.2011.07.073 2012