The open archive for STFC research publications

You may experience service outages on ePubs over the coming days due to work being carried out to enhance our network infrastructure. The service should be considered at risk from 23/11 - 03/12.

Full Record Details

Persistent URL http://purl.org/net/epubs/work/41201795
Record Status Checked
Record Id 41201795
Title Calibration correction of ultra low energy SIMS profiles based on MEIS analyses for arsenic shallow implants in silicon
Organisation CI
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Nucl Instrum Meth B 273 (2012): 192-194. doi:10.1016/j.nimb.2011.07.073 2012