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Persistent URL http://purl.org/net/epubs/work/49511
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Record Id 49511
Title Test Particle Monte-Carlo modelling of installations for NEG film pumping properties evaluation
Abstract Two installations were built in the ASTeC vacuum science laboratory to investigate the pumping properties of non-evaporable getter (NEG) films. An important parameter to characterise the pumping properties is the film sticking probability (a). Test Particle Monte-Carlo (TPMC) models were used for accurate evaluation of NEG film sticking probability from pressure readings during gas injection. The results of these models were used for interpreting the results of measurements in different experimental configurations: planar, cup and tubular samples. It was shown that there is a difference between simple formulas used in vacuum technique and TPMC results which is significant for a > 0.1 with planar samples, for a> 0.01 with cup samples, and in the full range of a for tubular samples. It was also shown that the gauge positions are very important, the exact position of the gauge or RGA ionisation chamber should be used in the modelling.
Organisation ASTeC , ASTeC-VS , CI , STFC
Keywords Physics , Non-evaporable getter (NEG) , Test Particle Monte-Carlo , Gas dynamics , NEG coating , NEG film
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Language English (EN)
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Journal Article Vacuum 83, no. 6 (2009): 976-979. doi:10.1016/j.vacuum.2008.11.008 2009