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Persistent URL http://purl.org/net/epubs/work/50106
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Record Id 50106
Title Growth of HfO2 by liquid injection MOCVD and ALD using new Hafnium-Cyclopentadienyl precursors
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Abstract
Organisation SRS , MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Chemical Vapor Deposition 12, no. 11 (2007): 609-617. doi:10.1002/cvde.200706589 2007