ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/50484
Record Status Checked
Record Id 50484
Title The use of ion beams in thin film deposition
Contributors
Abstract
Organisation
Keywords Physics
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Vacuum 36 (1986). 1986