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Persistent URL http://purl.org/net/epubs/work/50784
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Record Id 50784
Title Medium energy ion scattering analysis of the evolution and annealing of damage and associated dopant redistribution of ultra shallow implants in Si
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article Radiat Eff Defect S 164, no. 7+8 (2009): 481-491. Presented at: 2nd International Meeting on Recent Developments in the Studyof Radiation Effects in Matters, Fodele, Greece, 7-11 Sep 2008. doi:10.1080/10420150902949944 2009