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Persistent URL http://purl.org/net/epubs/work/52024
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Record Id 52024
Title Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure
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Language English (EN)
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Journal Article Opt Express 18, no. 2 (2010): 700-712. doi:10.1364/OE.18.000700 2010
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