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Persistent URL http://purl.org/net/epubs/work/52090067
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Record Id 52090067
Title High power vacuum ultraviolet source based on gasdynamic ECR plasma
Contributors
Abstract
Organisation ISIS , STFC
Keywords
Funding Information RFBR (20-32-70002); State Assignment (0035-2019-0002)
Related Research Object(s): 53913469
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Appl Phys 131, no. 9 (2022): 093301. doi:10.1063/5.0074388 2022