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Persistent URL	http://purl.org/net/epubs/work/52090067
Record Status	Checked
Record Id	52090067
Title	High power vacuum ultraviolet source based on gasdynamic ECR plasma
Contributors	RL Lapin, VA Skalyga, SV Golubev, IV Izotov, SV Razin, O Tarvainen (STFC Rutherford Appleton Lab.)
Abstract
Organisation	ISIS , STFC
Keywords
Funding Information	RFBR (20-32-70002); State Assignment (0035-2019-0002)
Related Research Object(s):	53913469
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	J Appl Phys 131, no. 9 (2022): 093301.	doi:10.1063/5.0074388		2022