The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/52092
Record Status Checked
Record Id 52092
Title Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics
Organisation MEIS , STFC
Keywords Materials
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 86 (2009): 1642-1645. doi:10.1016/j.mee.2009.03.084 2009