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Persistent URL http://purl.org/net/epubs/work/52092
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Record Id 52092
Title Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics
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Abstract
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 86 (2009): 1642-1645. doi:10.1016/j.mee.2009.03.084 2009