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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/52225
Record Status
Checked
Record Id
52225
Title
A new analytical method for characterising the bonding environment at rough interfaces in high-k gate stacks using electron energy loss spectroscopy
Contributors
BG Mendis
,
M MacKenzie
,
AJ Craven (STFC SuperSTEM)
Abstract
Organisation
STFC
Keywords
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Language
English (EN)
Type
Details
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Year
Journal Article
Ultramicroscopy
110, no. 2 (2010): 105-117.
doi:10.1016/j.ultramic.2009.09.013
2010
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