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Full Record Details

Persistent URL	http://purl.org/net/epubs/work/52353
Record Status	Checked
Record Id	52353
Title	High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
Contributors	M Reading (Salford U.), JA van den Berg (Salford U.), PC Zalm (Salford U.), DG Armour (Salford U.), P Bailey (STFC Daresbury Lab.), TCQ Noakes (STFC Daresbury Lab.), P Parisini (CNR-IMM), T Conrad (IMEC), S DeGendt (IMEC)
Abstract
Organisation	MEIS , STFC
Keywords	Materials
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	J Vac Sci Technol B 28, no. 1 (2010): CIC65-CIC70.	doi:10.1116/1.3248264		2010