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Persistent URL http://purl.org/net/epubs/work/52353
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Record Id 52353
Title High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article J Vac Sci Technol B 28, no. 1 (2010): CIC65-CIC70. doi:10.1116/1.3248264 2010