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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/52549104
Record Status
Checked
Record Id
52549104
Title
Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser
Contributors
F Walk (STFC Daresbury Lab., and Liverpool Univ.)
,
R Valizadeh (STFC Daresbury Lab., and Cockcroft Inst.)
,
JW Bradley (Cockcroft Inst., and Liverpool Univ.)
Abstract
Organisation
ASTeC
,
ASTeC-VS
,
CI
,
STFC
Keywords
Funding Information
ASTeC Group, STFC Daresbury Laboratory, UK
(internal funding);
STFC Daresbury Laboratory, UK
(internal funding);
UoL
(internal funding)
Related Research Object(s):
Licence Information:
Creative Commons Attribution 4.0 International (CC BY 4.0)
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
Plasma Sources Sci T
31, no. 6 (2022): 065002.
doi:10.1088/1361-6595/ac6a0d
2022
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