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Persistent URL http://purl.org/net/epubs/work/52549104
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Record Id 52549104
Title Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser
Organisation ASTeC , ASTeC-VS , CI , STFC
Funding Information ASTeC Group, STFC Daresbury Laboratory, UK (internal funding); STFC Daresbury Laboratory, UK (internal funding); University of Liverpool (internal funding)
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Licence Information: Creative Commons Attribution 4.0 International (CC BY 4.0)
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Plasma Sources Sci T 31, no. 6 (2022): 065002. doi:10.1088/1361-6595/ac6a0d 2022