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Persistent URL http://purl.org/net/epubs/work/52693
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Record Id 52693
Title 22 nm silicon nanowire gas sensor fabricated by trilayer nanoimprint and wet etching
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Organisation CMF , EID , STFC
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Microelectron Eng 87, no. 5-8 (2010): 927-930. doi:10.1016/j.mee.2009.11.173 2010
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