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Persistent URL http://purl.org/net/epubs/work/53213
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Record Id 53213
Title High Resolution Depth Profile Analysis of Ultra Thin High-κ Hf Based Films Using MEIS Compared with XTEM, XRF, SE and XPS
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Abstract
Organisation SRS , MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article ECS Transactions 25, no. 3 (2010): 349-361. doi:10.1149/1.3204425 2010
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