ePubs

The open archive for STFC research publications

You may experience service outages on ePubs over the coming days due to work being carried out to enhance our network infrastructure. The service should be considered at risk from 23/11 - 03/12.

Full Record Details

Persistent URL http://purl.org/net/epubs/work/53213
Record Status Checked
Record Id 53213
Title High Resolution Depth Profile Analysis of Ultra Thin High-κ Hf Based Films Using MEIS Compared with XTEM, XRF, SE and XPS
Contributors
Abstract
Organisation SRS , MEIS , STFC
Keywords Materials
Funding Information
Related Research Object(s):
Licence Information:
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article ECS Transactions 25, no. 3 (2010): 349-361. doi:10.1149/1.3204425 2010