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Persistent URL http://purl.org/net/epubs/work/53584
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Record Id 53584
Title Si Ultra Shallow Junctions Dopant Profiling with ADF-STEM
Organisation SRS , MEIS , STFC
Keywords Materials
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Language English (EN)
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Journal Article Mater. Res. Soc. Symp. Proc. 1026E (2007): 1026-C09-04. Is in proceedings of: Mater. Res. Soc. Symp. Proc. Fall 2007. 2007