ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/53584
Record Status Checked
Record Id 53584
Title Si Ultra Shallow Junctions Dopant Profiling with ADF-STEM
Contributors
Abstract
Organisation SRS , MEIS , STFC
Keywords Materials
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Mater. Res. Soc. Symp. Proc. 1026E (2007): 1026-C09-04. Is in proceedings of: Mater. Res. Soc. Symp. Proc. Fall 2007. 2007
Showing record 1 of 1