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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/53598
Record Status
Checked
Record Id
53598
Title
Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering
Contributors
G Saheli (Salford U.)
,
AG Conti (Salford U.)
,
Y Uritsky (Salford U.)
,
MA Foad (Salford U.)
,
CR Brundle (Salford U.)
,
P Mack (Salford U.)
,
D Kouzminov (Salford U.)
,
MJ Werner (Salford U.)
,
JA van den Berg (Salford U.)
Abstract
Organisation
MEIS
,
STFC
Keywords
Materials
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Journal Article
J Vac Sci Technol B
26, no. 1 (2007): 298-304.
doi:10.1116/1.2834689
2007
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