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Persistent URL http://purl.org/net/epubs/work/53598
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Record Id 53598
Title Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol B 26, no. 1 (2007): 298-304. doi:10.1116/1.2834689 2007