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Full Record Details
Persistent URL
http://purl.org/net/epubs/work/53759
Record Status
Checked
Record Id
53759
Title
Range and damage distributions in ultra-low energy boron implantation into silicon
Contributors
N Hatzopoulos (Salford U.)
,
S Suder (Salford U.)
,
JA van den Berg (Salford U.)
,
D Panknin (Salford U.)
,
W Fukarek (Salford U.)
,
SE Donnelly (Salford U.)
,
CEA Cook (Salford U.)
,
DG Armour (Salford U.)
,
M Lucassen (Salford U.)
,
I Frey (Salford U.)
,
MA Foad (Salford U.)
,
JG England (Salford U.)
,
S Moffatt (Salford U.)
,
P Bailey (CCLRC Daresbury Lab.)
,
TCQ Noakes (CCLRC Daresbury Lab.)
,
H Ohno (Salford U.)
Abstract
Organisation
CCLRC
,
MEIS
Keywords
Materials
Funding Information
Related Research Object(s):
Licence Information:
Language
English (EN)
Type
Details
URI(s)
Local file(s)
Year
Book Chapter or Section
In Ion Implantation Technology - 96. chapter 213, 527-530. 1997.
1997
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