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Persistent URL http://purl.org/net/epubs/work/55817
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Record Id 55817
Title Electrical and structural properties of ultrathin SiON films prepared by plasma nitridation
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Abstract
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article J Vac Sci Technol B 29, no. 2 (2011): 022011. doi:10.1116/1.3556938 2011
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