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Persistent URL http://purl.org/net/epubs/work/56519
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Record Id 56519
Title SrHfO(3) Films Grown on Si(100) by Plasma-Assisted Atomic Layer Deposition
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Abstract
Organisation MEIS , STFC
Keywords Materials
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Chem Mater 23, no. 10 (2011): 2518-2520. doi:10.1021/cm200315u 2011
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