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Persistent URL http://purl.org/net/epubs/work/65799
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Record Id 65799
Title Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon
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Organisation ASTeC , ASTeC-AP , STFC
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Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Surface and Interface Analysis 45, no. 1 (2013): 413-416. doi:10.1002/sia.5136 2013
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