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Persistent URL http://purl.org/net/epubs/work/65799
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Record Id 65799
Title Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon
Organisation ASTeC , ASTeC-AP , CI , STFC
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Language English (EN)
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Journal Article Surface and Interface Analysis 45, no. 1 (2012): 413-416. Is in proceedings of: 18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII), Trento, Italy, 18-23 Sep 2011. doi:10.1002/sia.5136 2012