ePubs

The open archive for STFC research publications

⚠ PURL issue currently affecting ePubs. Persistent Uniform Resource Locator (PURL) links in ePubs are not currently working. This is due to a cyber incident that has affected the third-party provider of the PURL system. We are hopeful that this issue will be resolved shortly.

Full Record Details

Persistent URL	http://purl.org/net/epubs/work/66381
Record Status	Checked
Record Id	66381
Title	Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
Contributors	JA van den Berg (Huddersfield U., and Salford U.), MA Reading (Salford U.), P Bailey (Huddersfield U.), TCQ Noakes (STFC Daresbury Lab.), C Adelmann (IMEC, Louvain, Belgium), M Popovici (IMEC, Louvain, Belgium), H Tielens (IMEC, Louvain, Belgium), T Conard (IMEC, Louvain, Belgium), S de Gendt (IMEC, Louvain, Belgium), S van Elshocht (Katholieke Univ Leuven, Louvain, Belgium)
Abstract
Organisation	ASTeC , CI , STFC , ASTeC-Ph
Keywords	ASTeC 2013-2014
Funding Information
Related Research Object(s):
Licence Information:
Language	English (EN)

Type	Details	URI(s)	Local file(s)	Year
Journal Article	Appl Surf Sci 281 (2013): 8-16.	doi:10.1016/j.apsusc.2013.02.003		2013