ePubs

The open archive for STFC research publications

Full Record Details

Persistent URL http://purl.org/net/epubs/work/66381
Record Status Checked
Record Id 66381
Title Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
Contributors
Abstract
Organisation ASTeC , STFC , ASTeC-Ph
Keywords ASTeC 2013-2014
Funding Information
Related Research Object(s):
Language English (EN)
Type Details URI(s) Local file(s) Year
Journal Article Appl Surf Sci 281 (2013): 8-16. doi:10.1016/j.apsusc.2013.02.003 2013
Showing record 1 of 1