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Persistent URL http://purl.org/net/epubs/work/66381
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Record Id 66381
Title Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
Organisation ASTeC , CI , STFC , ASTeC-Ph
Keywords ASTeC 2013-2014
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Language English (EN)
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Journal Article Appl Surf Sci 281 (2013): 8-16. doi:10.1016/j.apsusc.2013.02.003 2013